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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB01041046>
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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB01041046>
Functions:
Details
URL:

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No. Library Location2 Location Call No Volume Available Years/Months Accession status
0001 Ishinomaki 雑誌架(3F) 書庫1 11-34 1993-2016
No. 0001
Library Ishinomaki
Location2 雑誌架(3F)
Location 書庫1
Call No
Volume 11-34
Available Years/Months 1993-2016
Accession status
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Bibliography Details

title and statement of responsibility area Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
Volumes and Years of Serial Vol. 9, no. 1 (Jan./Feb. 1991)-
publication,distribution,etc.,area New York : American Institute of Physics , 1991-
physical description area v. : ill. ; 29 cm
variant titles 表紙タイトル:Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena
variant titles 背表紙タイトル:JVSTB, Nanotechnology & microelectronics
NCID AA10804928
text language code English
frequency of publication code Bimonthly
ISSN 21662746
relation bibliography link 継続前誌 :Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <>
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